Filed pursuant to Rule 424(b)(3)
                                                             Reg No.333-83266


PROSPECTUS SUPPLEMENT NO. 13
(To Prospectus filed with the Securities and Exchange Commission (the
"Commission") under cover of a Registration Statement on Form F-3 on February
20, 2002, as supplemented and amended by Prospectus Supplement No. 1, filed
with the Commission on May 1, 2002, Prospectus Supplement No. 2, filed with
the Commission on May 31, 2002, Prospectus Supplement No. 3, filed with the
Commission on June 7, 2002, Prospectus Supplement No. 4, filed with the
Commission on July 25, 2002, Prospectus Supplement No. 5, filed with the
Commission on September 26, 2002, Prospectus Supplement No. 6, filed with the
Commission on December 12, 2002, Prospectus Supplement No. 7, filed with the
Commission on January 17, 2003, Prospectus Supplement No. 8, filed with the
Commission on January 31, 2003, Prospectus Supplement No. 9, filed with the
Commission on February 13, 2003, Prospectus Supplement No. 10, filed with the
Commission on March 6, 2003, Prospectus Supplement No. 11, filed with the
Commission on April 8, 2003, and Prospectus Supplement No. 12, filed with the
Commission on May 28, 2003).

                               ASML Holding N.V.
                          30,814,576 Ordinary Shares

         This Prospectus Supplement No. 13 supplements and amends the
Prospectus relating to 30,814,576 of our ordinary shares, issuable upon
conversion of our 5.75% convertible subordinated notes due 2006, as filed with
the Commission under cover of a Registration Statement on Form F-3 on February
20, 2002, as supplemented by Prospectus Supplement No. 1, filed with the
Commission on May 1, 2002, Prospectus Supplement No. 2, filed with the
Commission on May 31, 2002, Prospectus Supplement No. 3, filed with the
Commission on June 7, 2002, Prospectus Supplement No. 4, filed with the
Commission on July 25, 2002, Prospectus Supplement No. 5, filed with the
Commission on September 26, 2002, Prospectus Supplement No. 6, filed with the
Commission on December 12, 2002, Prospectus Supplement No. 7, filed with the
Commission on January 17, 2003, Prospectus Supplement No. 8, filed with the
Commission on January 31, 2003, Prospectus Supplement No. 9, filed with the
Commission on February 13, 2003, Prospectus Supplement No. 10, filed with the
Commission on March 6, 2003, Prospectus Supplement No. 11, filed with the
Commission on April 8, 2003, and Prospectus Supplement No. 12, filed with the
Commission on May 28, 2003.

         The table on pages 13 through 16 of the Prospectus (as supplemented
and amended) sets forth information with respect to the selling
securityholders and the respective number of ordinary shares to be
beneficially owned by each selling securityholder upon conversion of the 5.75%
convertible subordinated notes due 2006 and that may be offered pursuant to
the Prospectus (as supplemented and amended). This Prospectus Supplement No.
13 amends that table by adding the items set forth below.




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              Selling Securityholder                 Number of Ordinary Shares to be     Percentage of Total
                                                     Owned Upon Conversion of 5.75%       Amount of Ordinary
                                                     Convertible Subordinated Notes     Shares outstanding as
                                                       due 2006 and Offered Hereby       of December 31, 2001

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Argent Classic Convertible Arbitrage Fund LP                     26,795                           *
3100 Tower Blvd., Suite 1104
Durham, NC 27707
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Xavex Convertible Arbitrage 10 Fund                              37,513                           *
3100 Tower Blvd., Suite 1104
Durham, NC 27707
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*Less than 1%

         The Prospectus, together with Prospectus Supplement Nos. 1, 2, 3, 4,
5, 6, 7, 8, 9, 10, 11, 12 and this Prospectus Supplement No. 13, constitutes
the Prospectus required to be delivered by Section 5(b) of the Securities Act
of 1933 with respect to offers and sales of ordinary shares, nominal value
Euro 0.02 per share, issuable upon conversion of our 5.75% convertible
subordinated notes due 2006.

         Prospective investors should carefully consider matters discussed
under the caption "Risk Factors" beginning on page 1 of the Prospectus.

         Neither the Commission nor any U.S. state securities regulators have
approved or disapproved of these securities or determined if this Prospectus
Supplement No. 13 is truthful or complete. Any representation to the contrary
is a criminal offense.

         The date of this Prospectus Supplement No. 13 is July 11, 2003.