4 1 4 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 4 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP [ ] Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. 1. Name and Address of Reporting Person(s) Campagna, John Peter 12233 Menalto Drive . . Los Altos Hills, CA 94022 2. Issuer Name and Ticker or Trading Symbol KLA-Tencor Corporation (KLAC) 3. I.R.S. Identification Number of Reporting Person, if an entity (Voluntary) 4. Statement for Month/Day/Year 05/02/2003 5. If Amendment, Date of Original (Month/Day/Year) 6. Relationship of Reporting Person(s) to Issuer (Check all applicable) [ ] Director [ ] 10% Owner [X] Officer (give title below) [ ] Other (specify below) Vice President and Treasurer 7. Individual or Joint/Group Filing (Check Applicable Line) [X] Form filed by One Reporting Person [ ] Form filed by More than One Reporting Person Table I Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned ------------------------------------------------------------------------------------------------------------------------------------ 1)Title of Security 2)Trans- 3.Trans- 4.Securities Acquired(A) 5)Amount of 6) 7)Nature of action action or Disposed of (D) Securities Indirect Date Code A Beneficially D Beneficial (Month/ or Owned at or Ownership Day/Year) Code V Amount D Price End of Month I ------------------------------------------------------------------------------------------------------------------------------------ Common Stock 05/02/03 M 5,850 A $29.3100 D Direct Common Stock 05/02/03 S 5,850 D $41.8390 0 D Direct Table II (PART 1) Derivative Securities Acquired, Disposed of, or Beneficially Owned (Columns 1 through 6) ------------------------------------------------------------------------------------------------------------------------------------ 1)Title of Derivative 2)Conversion 3)Trans- 4)Trans- 5)Number of Derivative 6)Date Exercisable and Security or Exercise action action Securities Acquired (A) Expiration Date Price of Date Code or Disposed of (D) Derivative Security Code V A D Exercisable Expiration ------------------------------------------------------------------------------------------------------------------------------------ Non-Qualified Stock Option $29.3100 05/02/03 M 5,850 10/02/11 (right to buy) Non-Qualified Stock Option $31.8125 12/22/10 (right to buy) Non-Qualified Stock Option $34.6700 01/28/13 (right to buy) Non-Qualified Stock Option $37.0500 11/08/12 (right to buy) Table II (PART 2) Derivative Securities Acquired, Disposed of, or Beneficially Owned (Columns 1,3 and 7 through 11) ------------------------------------------------------------------------------------------------------------------------------------ 1)Title of Derivative 3)Trans- 7)Title and Amount 8)Price 9)Number of 10) 11)Nature of Security action of Underlying of Deri- Derivative Indirect Date Securities vative Securities D Beneficial Amount or Security Beneficially or Ownership Number of Owned at I - Title Shares End of Month ------------------------------------------------------------------------------------------------------------------------------------ Non-Qualified Stock Option 05/02/03 Common Stock 5,850 13,650 D Direct (right to buy) Non-Qualified Stock Option Common Stock 16,730 16,730 D Direct (right to buy) Non-Qualified Stock Option Common Stock 6,500 6,500 D Direct (right to buy) Non-Qualified Stock Option Common Stock 3,250 3,250 D Direct (right to buy)Explanation of Responses: SIGNATURE OF REPORTING PERSON /S/ By: Stuart J. Nichols For: John Peter Campagna DATE 05/02/03