Ownership Submission
FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
BROOKS D MAYSON
  2. Issuer Name and Ticker or Trading Symbol
RUDOLPH TECHNOLOGIES INC [RTEC]
5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
VP, Global Sales Inspection
(Last)
(First)
(Middle)
C/O RUDOLPH TECHNOLOGIES, INC., ONE RUDOLPH ROAD, PO BOX 1000
3. Date of Earliest Transaction (Month/Day/Year)
02/15/2006
(Street)

FLANDERS, NJ 07836
4. If Amendment, Date Original Filed(Month/Day/Year)
6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)
2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)
4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)
5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)
6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)
7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 02/15/2006   A   0 (1) A $ 0 0 D  

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)
2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)
5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)
6. Date Exercisable and Expiration Date
(Month/Day/Year)
7. Title and Amount of Underlying Securities
(Instr. 3 and 4)
8. Price of Derivative Security
(Instr. 5)
9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)
10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)
11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Incentive Stock Option (right to buy) $ 3.11 02/15/2006   A   12,733     (2) 07/06/2006 Common Stock 12,733 $ 0 12,733 D  
Incentive Stock Option (right to buy) $ 10 02/15/2006   A   1,333     (3) 10/22/2014 Common Stock 1,333 $ 0 1,333 D  
Incentive Stock Option (right to buy) $ 13.7 02/15/2006   A   1,715     (4) 05/01/2007 Common Stock 1,715 $ 8 1,715 D  
Incentive Stock Option (right to buy) $ 14.81 02/15/2006   A   6,753     (5) 01/25/2016 Common Stock 6,753 $ 0 6,753 D  
Incentive Stock Option (right to buy) $ 15.87 02/15/2006   A   1,926     (6) 03/07/2015 Common Stock 1,926 $ 0 1,926 D  
Incentive Stock Option (right to buy) $ 16.23 02/15/2006   A   9,175     (7) 08/28/2007 Common Stock 9,175 $ 0 9,175 D  
Incentive Stock Option (right to buy) $ 16.71 02/15/2006   A   377     (8) 07/21/2015 Common Stock 377 $ 0 377 D  
Incentive Stock Option (right to buy) $ 17.38 02/15/2006   A   1,715     (9) 08/04/2007 Common Stock 1,715 $ 0 1,715 D  
Non-Qualified Stock Option (right to buy) $ 5.64 02/15/2006   A   9,150     (10) 12/19/2009 Common Stock 9,150 $ 0 9,150 D  
Non-Qualified Stock Option (right to buy) $ 6.17 02/15/2006   A   5,337     (11) 07/18/2009 Common Stock 5,337 $ 0 5,337 D  
Non-Qualified Stock Option (right to buy) $ 6.23 02/15/2006   A   2,287     (12) 10/25/2009 Common Stock 2,287 $ 0 2,287 D  
Non-Qualified Stock Option (right to buy) $ 13.19 02/15/2006   A   3,431     (13) 12/07/2008 Common Stock 3,431 $ 0 3,431 D  
Non-Qualified Stock Option (right to buy) $ 13.59 02/15/2006   A   1,854     (14) 07/30/2014 Common Stock 1,854 $ 0 1,854 D  
Non-Qualified Stock Option (right to buy) $ 13.62 02/15/2006   A   7,625     (15) 12/30/2014 Common Stock 7,625 $ 0 7,625 D  
Non-Qualified Stock Option (right to buy) $ 13.78 02/15/2006   A   2,287     (16) 04/06/2008 Common Stock 2,287 $ 0 2,287 D  
Non-Qualified Stock Option (right to buy) $ 13.86 02/15/2006   A   2,287     (17) 12/15/2007 Common Stock 2,287 $ 0 2,287 D  
Non-Qualified Stock Option (right to buy) $ 14.81 02/15/2006   A   6,763     (5) 01/25/2016 Common Stock 6,763 $ 8 6,763 D  
Non-Qualified Stock Option (right to buy) $ 16.23 02/15/2006   A   7,599     (7) 08/28/2007 Common Stock 7,599 $ 0 7,599 D  
Non-Qualified Stock Option (right to buy) $ 17.19 02/15/2006   A   1,467     (18) 04/30/2014 Common Stock 1,467 $ 0 1,467 D  
Non-Qualified Stock Option (right to buy) $ 17.37 02/15/2006   A   3,812     (19) 07/12/2008 Common Stock 3,812 $ 0 3,812 D  
Non-Qualified Stock Option (right to buy) $ 17.37 02/15/2006   A   5,718     (20) 07/12/2008 Common Stock 5,718 $ 0 9,530 D  
Non-Qualified Stock Option (right to buy) $ 17.38 02/15/2006   A   571     (9) 08/04/2007 Common Stock 571 $ 0 571 D  
Non-Qualified Stock Option (right to buy) $ 17.55 02/15/2006   A   1,525     (21) 01/05/2008 Common Stock 1,525 $ 0 1,525 D  
Non-Qualified Stock Option (right to buy) $ 18.68 02/15/2006   A   5,718     (22) 04/05/2009 Common Stock 5,718 $ 0 5,718 D  
Non-Qualified Stock Option (right to buy) $ 24.2 02/15/2006   A   4,766     (23) 02/06/2014 Common Stock 4,766 $ 0 4,766 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
BROOKS D MAYSON
C/O RUDOLPH TECHNOLOGIES, INC.
ONE RUDOLPH ROAD, PO BOX 1000
FLANDERS, NJ 07836
      VP, Global Sales Inspection  

Signatures

 By: /s/ Robert A. Koch For: D. Mason Brooks   02/17/2006
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Mr. Brooks was the holder of 3,477 shares of August Technology Corporation common stock. In the merger (the "Merger") of August Technology Corporation with and into NS Merger Sub, Inc. ("Merger Sub"), a wholly owned subsidiary of Rudolph Technologies, Inc. ("Rudolph"), each share of August Technology Corporation common stock was canceled and will be converted into the right to receive either $10.50 in cash or 0.7625 of a share of common stock, par value $0.001 per share, of Rudolph common stock, or a combination of cash and Rudolph common stock, subject to the proration and allocation procedures set forth in the Agreement and Plan of Merger, as amended, by and among Rudolph, Merger Sub and August Technology Corporation. At this time, the actual number of shares held by Mr. Brooks is not known. Upon completion of the proration and allocation computations, an amended Form 4 shall be filed to reflect the shares of Rudolph common stock held by Mr. Brooks.
(2) Pursuant to a merger agreement by and among the August Technology Corporation ("August"), Rudolph Technologies, Inc. ("Rudolph") and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the "Merger"), the option to purchase 16,700 shares of August Technology Corporation ("August") common stock for $2.37 per share, initially granted by August on July 6, 1999, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(3) The option to purchase 1,749 shares of August common stock for $7.62 per share, initially granted by August on October 22, 2004, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(4) The option to purchase 2,250 shares of August common stock for $10.44 per share, initially granted by August on May 1, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(5) The option to purchase 17,727 shares of August common stock for $11.29 per share, initially granted by August on January 25, 2006, which provided for vesting in annual increments of 20% of the shares beginning January 25, 2006, was assumed by Rudolph in the Merger and replaced with the referenced options with the same vesting terms.
(6) The option to purchase 2,526 shares of August common stock for $12.10 per share, initially granted by August on March 7, 2005, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(7) The options to purchase 22,000 shares of August common stock for $12.375 per share, initially granted by August on December 19, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested options.
(8) The option to purchase 495 shares of August common stock for $12.74 per share, initially granted by August on July 21, 2005, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(9) The option to purchase 3,000 shares of August common stock for $13.25 per share, initially granted by August on August 4, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested options.
(10) The option to purchase 12,000 shares of August common stock for $4.30 per share, initially granted by August on December 19, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(11) The option to purchase 7,000 shares of August common stock for $4.70 per share, initially granted by August on July 18, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(12) The option to purchase 3,000 shares of August common stock for $4.75 per share, initially granted by August on October 25, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(13) The option to purchase 4,500 shares of August common stock for $10.05 per share, initially granted by August on December 7, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(14) The option to purchase 2,432 shares of August common stock for $10.36 per share, initially granted by August on July 30, 2004, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(15) The option to purchase 10,000 shares of August common stock for $10.38 per share, initially granted by August on December 30, 2004, which provided for vesting of 34% of the shares on December 30, 2004 and 33% on December 30, 2005 and 2006, was assumed by Rudolph in the Merger and replaced with the referenced option with the same vesting terms.
(16) The option to purchase 3,000 shares of August common stock for $10.50 per share, initially granted by August on April 6, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(17) The option to purchase 3,000 shares of August common stock for $10.563 per share, initially granted by August on December 15, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(18) The option to purchase 1,924 shares of August common stock for $13.10 per share, initially granted by August on April 30, 2004, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(19) The option to purchase 5,000 shares of August common stock for $13.24 per share, initially granted by August on July 12, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(20) The option to purchase 7,500 shares of August common stock for $13.24 per share, initially granted by August on July 12, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(21) The option to purchase 2,000 shares of August common stock for $13.375 per share, initially granted by August on January 5, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(22) The option to purchase 7,500 shares of August common stock for $14.24 per share, initially granted by August on April 5, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.
(23) The option to purchase 6,251 shares of August common stock for $18.45 per share, initially granted by August on February 6, 2004, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.

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