UNITED STATES SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                 SCHEDULE 13G/A

                    UNDER THE SECURITIES EXCHANGE ACT OF 1934
                               (AMENDMENT NO. 3)*

                             Metron Technology N.V.
                             ----------------------
                                (Name of Issuer)

                   Common Shares, par value NLG 0.96 per share
                   -------------------------------------------
                         (Title of Class of Securities)

                                    N5665B105
                                 --------------
                                 (CUSIP Number)

                                December 31, 2001
                                -----------------
             (Date of Event Which Requires Filing of This Statement)


Check the appropriate box to designate the rule pursuant to which this Schedule
is filed:

          / /     Rule 13d-1(b)

          / /     Rule 13d-1(c)

          /X/     Rule 13d-1(d)

* The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).

                                Page 1 of 5 pages



 ---------------------------                    -----------------------
 CUSIP NO. N5665B105               13G/A            PAGE 2 OF 5 PAGES
 ---------------------------                    -----------------------

---------- -------------------------------------------------------------------
 1         NAME OF REPORTING PERSON
           I.R.S. IDENTIFICATION NO(S). OF ABOVE PERSON(S) (ENTITIES ONLY)\
           Entegris, Inc.
---------- -------------------------------------------------------------------
 2         CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP
           (a)
           (b)
---------- -------------------------------------------------------------------
 3         SEC USE ONLY

---------- -------------------------------------------------------------------
 4         CITIZENSHIP OR PLACE OF ORGANIZATION
           Minnesota
---------- -------------------------------------------------------------------
                         5     SOLE VOTING POWER
       NUMBER OF               1,590,062*
         SHARES        ----- -------------------------------------------------
      BENEFICIALLY       6     SHARED VOTING POWER
        OWNED BY               0
          EACH         ----- -------------------------------------------------
       REPORTING         7     SOLE DISPOSITIVE POWER
         PERSON                1,590,062*
          WITH:        ----- -------------------------------------------------
                         8     SHARED DISPOSITIVE POWER
                               0
---------- ------------------------------------------------------------------
 9         AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
           1,590,062*
---------- -------------------------------------------------------------------
 10        CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES

---------- -------------------------------------------------------------------
 11        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
           12.4%
---------- -------------------------------------------------------------------
 12        TYPE OF REPORTING PERSON
           CO
---------- -------------------------------------------------------------------

*    Includes 24,375 shares issuable to James Dauwalter, President of Entegris,
     Inc. ("Entegris"), pursuant to options exercisable within 60 days of
     December 31, 2001. Pursuant to an agreement between Mr. Dauwalter and
     Entegris, Mr. Dauwalter assigned ownership rights to all shares issuable
     upon exercise of such options to Entegris.

                                Page 2 of 5 pages



ITEM 1.

     (a)  NAME OF ISSUER
          Metron Technology N.V.

     (b)  ADDRESS OF ISSUER'S PRINCIPAL EXECUTIVE OFFICES
          1350 Old Bayshore Highway, Suite 210
          Burlingame, CA 94010

ITEM 2.

     (a)  NAME OF PERSON FILING
          Entegris, Inc.

     (b)  ADDRESS OF PRINCIPAL BUSINESS OFFICE OR, IF NONE, RESIDENCE
          3500 Lyman Boulevard
          Chaska, MN 55318

     (c)  CITIZENSHIP
          Minnesota

     (d)  TITLE OF CLASS OF SECURITIES
          Common Shares, par value NLG 0.96 per share

     (e)  CUSIP NUMBER
          N5665B105

ITEM 3. IF THIS STATEMENT IS FILED PURSUANT TO SECITONS 240.13d-1(b), OR
        240.13d-2(b) OR (c), CHECK WHETHER THE PERSON FILING IS A:
        Not applicable.

ITEM 4. OWNERSHIP

     (a)  AMOUNT BENEFICIALLY OWNED:
                  1,590,062 shares, including 24,375 shares issuable to James
                  Dauwalter, President of Entegris, Inc. ("Entegris"), pursuant
                  to options exercisable within 60 days of December 31, 2001.
                  Pursuant to an agreement between Mr. Dauwalter and Entegris,
                  Mr. Dauwalter assigned ownership rights to all shares issuable
                  upon exercise of such options to Entegris.

     (b)  PERCENT OF CLASS: 12.4%

     (c)  NUMBER OF SHARES AS TO WHICH SUCH PERSON HAS:

          (i)  Sole power to vote or to direct the vote: 1,590,062
          (ii) Shared power to vote or to direct the vote: 0
         (iii) Sole power to dispose or to direct the disposition of: 1,590,062
          (iv) Shared power to dispose or to direct the disposition of: 0

                                   Page 3 of 5



ITEM 5. OWNERSHIP OF FIVE PERCENT OR LESS OF A CLASS
        Not applicable.

ITEM 6. OWNERSHIP OF MORE THAN FIVE PERCENT ON BEHALF OF ANOTHER PERSON
        Not applicable.

ITEM 7. IDENTIFICATION AND CLASSIFICATION OF THE SUBSIDIARY WHICH ACQUIRED
        THE SECURITY BEING REPORTED ON BY THE PARENT HOLDING COMPANY
        Not applicable.

ITEM 8. IDENTIFICATION AND CLASSIFICATION OF MEMBERS OF THE GROUP
        Not applicable.

ITEM 9. NOTICE OF DISSOLUTION OF A GROUP
        Not applicable.

ITEM 10. CERTIFICATION
         Not applicable.

                                Page 4 of 5 pages



                                    SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, I certify
that the information set forth in this statement is true, complete and correct.

Dated: February 13, 2002

                                                  ENTEGRIS, INC.



                                               By:  /s/ John Villas
                                                  ----------------------------
                                                   John Villas
                                                   Executive Vice President and
                                                   Chief Financial Officer

                                Page 5 of 5 pages